Micro Photo Detector Fabricated of Ferroelectric–Metal Heterostructure

概要

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The anomalous photovoltaic effect (APE) in ferroelectric thin films has been utilized for the development of an optical micro-detector active in the visible range (from 350 to 800 nm). La-doped Pb(Zr,Ti)O3 (PLZT) ferroelectric films epitaxially grown on Pt(001)/Mg(001) substrate were fabricated into micro-detector arrays and characterized as to their optical response. The Au/PLZT/Pt/MgO device was self-polarized in the as-deposited form with the polarization vector perpendicular to film surface. The heterostructure photovoltage response ranged from 100 to 200 mV, and the photocurrent was ${\sim} 30$ nA/cm2 for devices of ${\sim} 250$ μm diameter under illumination of 100 mW/cm2 at wavelengths from 400 to 580 nm. Such micro-detectors can be used for optical sensors in MEMS devices as well as for electrical stimulators of biological cells.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2005-08-15