Deposited Energy Dependence of Surface Roughness of Polymethylmethacrylate Irradiated by Electron Beam

概要

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A polymethylmethacrylate board is irradiated by an electron beam, and a spatial variation of the roughness in the cleaved cross-sectional surface below the irradiated point is observed. The equi-roughness contour of the surface almost agrees with the equi-energy-deposited contour obtained by a Monte Carlo simulation of electron trajectories. The relationship between the energy deposited and the granule size is obtained on the basis of the g-value in radiation chemistry; we find that the more the energy deposited, the smaller the granule size obtained, neglecting the roughness found around the maximum electron range. Upon changing the dose, the roughness also varies, and a variation of characteristic features is observed. The granule size expected from the energy deposited, however, gives less than 1/9 of the granule size obtained in the experiment. Although it is expected that there is a close correlation among the granule size observed by scanning electron microscope, the size of the molecule, and the local molecular weight, the quantitative correspondence is not well known. There might be some other mechanisms to explain the difference.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2005-07-15