Preparation and Characterization of Organic Thin Films on Substrates and Self-Supporting Films by RF Sputtering of Polyimide Films

スポンサーリンク

概要

• 論文の詳細を見る

• Organic thin films were prepared on substrates by a radio-frequency sputtering method using a polyimide film (Upilex-S) target, and some of them were successfully obtained as self-supporting thin films. It was found that these films were insoluble in an organic solvent, indicating that they were polymeric. The spectra of Fourier Transform Infrared Spectroscopy (FT-IR), X-Ray Diffraction (XRD) and optical absorption showed that the deposited films were amorphous but polyimide-like. The high durability of the films against heat and wear was also evaluated. Results suggested that these polymer-like films may be used as practical film materials for organic or hybrid electronic devices.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2005-04-15

著者

• Baba Mamoru

  Graduate School of Engineering, Iwate University

• Oishi Yoshiyuki

  Faculty Of Engineering Iwate University

• Ren Yue

  Graduate School Of Engineering Iwate University

• Ren Yue

  Graduate School of Engineering, Iwate University, 4-3-5 Ueda, Morioka 020-8551, Japan

• Baba Mamoru

  Graduate School of Engineering, Iwate University, 4-3-5 Ueda, Morioka 020-8551, Japan

関連論文

• Lithium-ion conductive glass-ceramics with composition ratio control and their electrochemical characteristics
• Preparation and Characterization of Organic Thin Films on Substrates and Self-Supporting Films by RF Sputtering of Polyimide Films
• Preparation and Characterization of Organic Thin Films on Substrates and Self-Supporting Films by RF Sputtering of Polyimide Films

スポンサーリンク