Characteristics of Two-Dimensional Array-Type Barrier Microdischarges Operating at High Pressures of Inert Gases

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概要

• 論文の詳細を見る

• The characteristics of barrier microdischarges in a two-dimensional array have been investigated under pressures of inert gases less than 18 atm. A stable discharge is obtained and vacuum ultraviolet (VUV) light emissions radiating from excimers are detected in the entire range of pressures with various scales of microdischarge. VUV light intensity is linearly proportional to an externally applied voltage. The intensity also linearly increases with pressure less than apporoximately 5 atm and gradually decreases with increasing pressure. The pressure giving a maximum intensity, $p_{\text{m}}$, increases with decreasing microhole diameter of discharge. The ratio of VUV light intensity to electric input energy of discharge increases linearly with pressure up to $p_{\text{m}}$.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2005-03-15

著者

• Sakurai Takeki

  Interdisciplinary Graduate School Of Medicine And Engineering University Of Yamanashi

• Yoshida Shougo

  Interdisciplinary Graduate School of Medicine and Engineering, University of Yamanashi, 4-3-11 Takeda, Kofu 400-8511, Japan

• Yoshikawa Hirohisa

  Interdisciplinary Graduate School of Medicine and Engineering, University of Yamanashi, 4-3-11 Takeda, Kofu 400-8511, Japan

• Yoshizawa Shoutarou

  Interdisciplinary Graduate School of Medicine and Engineering, University of Yamanashi, 4-3-11 Takeda, Kofu 400-8511, Japan

• Morimitu Akinobu

  ORC Manufacturing Co, Ltd, 3-34-2 Choufugaoka, Choufu 182-8580, Japan

関連論文

• Characteristics of Two-Dimensional Array-Type Barrier Microdischarges Operating at High Pressures of Inert Gases
• Surface Charges in a Coplanar-Electrode Microgap Discharge Measured at Various Gas Pressures Using an Electrooptic Crystal

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