Reflective Microoptical Element Array Fabricated by Photofabrication Technique

概要

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The authors present reflective microoptical element arrays fabricated by a photofabrication technique. The three-dimensional base of the microoptical element array is photofabricated by exposing photopolymerizable resin to a light beam through a grayscale mask. Reflective film on the photopolymerized base of the optical element is introduced to prevent serious problems in photofabricated refractive optical elements, such as when the optical characteristics of the elements fundamentally depends on the spectroscopic property of the material of the photofabricated optical element. The relationship between the pixel value in the grayscale bitmap image used for making the grayscale transparency mask and the cure depth of the photofabricated base is experimentally clarified for a photopolymerizable resin. $15\times 15$ unit convex and concave micromirror arrays, in which each optical element has a diameter of 930 μm, have been batch fabricated. The focusing capability of the fabricated concave micromirror array is demonstrated.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2004-08-15