65 nm Device Manufacture Using Shaped E-Beam Lithography
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概要
- 論文の詳細を見る
In the frame of the ALLIANCE program between Motorola, Philips Semiconductors and STMicroelectronics, electron beam direct write (EBDW) lithography based on shaped beam projection is employed to start quickly an aggressive 65 nm program for the printing of all critical levels. This paper reviews the economical opportunities offered by the introduction of electron beam (E-Beam) lithography for prototyping and advanced research and development applications. EBDW process integration capabilities are also demonstrated, confirming after electrical validation, the real possibilities of EBDW solution for application specific on integrated circuit (ASIC) manufacturing.
- 2004-06-15
著者
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Leverd Francois
Stmicroelectronics
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Henry Daniel
Stmicroelectronics
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Judong Fabienne
Stmicroelectronics
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Palla Ramiro
Stmicroelectronics
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Broekaart Marcel
Philips Semiconductors
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PAIN Laurent
CEA-LETI/Grenoble
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JURDIT Murielle
CEA-LETI/Grenoble
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LAPLANCHE Yves
STMicroelectronics
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TODESCHINI Jerome
PHILIPS Semiconductors
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LEININGER Hugues
STMicroelectronics
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TOURNIOL Sonia
STMicroelectronics
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FAURE Romuald
STMicroelectronics
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BOSSY Xavier
STMicroelectronics
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BEVERINA Alessio
STMicroelectronics
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BROSSELIN Karine
STMicroelectronics
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DEPOYAN Linda
STMicroelectronics
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JOSSE Emmanuelle
STMicroelectronics
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HINSINGER Olivier
STMicroelectronics
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BRUN Philippe
CEA-LETI/Grenoble
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WOO Michael
MOTOROLA
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TAVEL Brice
PHILIPS Semiconductors
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ARNAUD Franck
STMicroelectronics
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Stolk Peter
Philips Research Leuven
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Woo Michael
MOTOROLA, 850 rue Jean Monnet, F-38926 Crolles Cedex, France
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Le Friec
STMicroelectronics, 850 rue Jean Monnet, F-38926 Crolles Cedex, France
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De Jonghe
PHILIPS Semiconductors, 860 rue Jean Monnet 38926 Crolles Cedex, France
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Leverd Francois
STMicroelectronics, 850 rue Jean Monnet, F-38926 Crolles Cedex, France
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Brun Philippe
CEA-LETI/Grenoble, 17 rue des martyrs, F-38054 Grenoble Cedex 9, France
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Bossy Xavier
STMicroelectronics, 850 rue Jean Monnet, F-38926 Crolles Cedex, France
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Faure Romuald
STMicroelectronics, 850 rue Jean Monnet, F-38926 Crolles Cedex, France
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Stolk Peter
PHILIPS Semiconductors, 860 rue Jean Monnet 38926 Crolles Cedex, France
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Palla Ramiro
STMicroelectronics, 850 rue Jean Monnet, F-38926 Crolles Cedex, France
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Todeschini Jérôme
PHILIPS Semiconductors, 860 rue Jean Monnet 38926 Crolles Cedex, France
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Jurdit Murielle
CEA-LETI/Grenoble, 17 rue des martyrs, F-38054 Grenoble Cedex 9, France
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