Surface Acoustic Wave Unidirectional Transducers Using Grating Substrates and Resonators Using $\lambda$-Period Reflectors

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概要

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• Surface acoustic wave (SAW) filters employing a unidirectional interdigital transducer (UIDT) show low loss, wide band properties. In this paper we describe a new single phase unidirectional transducer (UDT) of about $\lambda/4$ electrode width with the best transducer efficiency. The new UDTs are fabricated on the very thin dielectric grating or very shallow groove grating SAW substrates. The electromechanical couplings ($k^{2}$) of electrodes on SiO2 gratings decrease rapidly for film thickness. Therefore the good properties of UDT are obtained for very thin SiO2 (about 0.3 μm and 0.03 μm at 100 MHz and 1 GHz, respectively). The calculation results show wide-band, low-loss filters with various $k^{2}$ materials. Also, the electrodes of $\lambda/2$ width have large reflection coefficients of SAW. The calculation and experimental results of SAW resonators with $\lambda/2$ electrode width and $\lambda$-period using susceptance changes are described.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2004-05-15

著者

• Satoh Yusuke

  Electronics Engineering, Tohoku Institute of Technology, 35-1 Yagiyama, Taihakuku, Sendai 982-8577, Japan

• Yamanouchi Kazuhiko

  Electronics Engineering, Tohoku Institute of Technology, 35-1 Yagiyama, Taihakuku, Sendai 982-8577, Japan

関連論文

• Surface Acoustic Wave Unidirectional Transducers Using Grating Substrates and Resonators Using $\lambda$-Period Reflectors

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