Improvement of the Liquid-Crystal-Display Matrix Exposure Using an Aperture Plate for Reshaping Cell Windows

概要

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A new method for improving the smoothness of patterns obtained by matrix projection exposure using a liquid crystal display (LCD) in place of a conventional reticle is proposed. When patterns are printed by simply setting the LCD cells as transparent or opaque, they have defects at the cell boundaries, because the exposure light rays are always stopped despite the clarity of the cells. Thin film transistors used for controlling the LCD cells as transparent or opaque also obstruct the exposure light rays from passing through. In order to solve these problems, an aperture plate with numerous circular hole apertures corresponding to each liquid-crystal cell window is placed contacting to the LCD panel. As a result, the cell windows are reshaped into circles, and discretely positioned hole patterns are printed. However, when the matrix is moved by half a pitch and the gaps between the first exposed hole patterns are exposed, very smooth patterns are printed successfully. The new matrix-exposure method is feasible for various patterning methods with low cost and short turn-around time.
2004-01-15