Frictional Property of Zinc Oxide Coating Films Observed by Lateral Force Microscopy
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概要
- 論文の詳細を見る
Zinc oxide coating films were synthesized by a magnetron sputter deposition method on stainless steel substrates. The crystal structure of the films was analyzed with X-ray diffraction spectroscopy. Adhesion and frictional properties were obtained from force curves and lateral force data using atomic force microscopy under an atmosphere and in a vacuum. It was found that the friction coefficient decreased in spite of a marked increase in adhesion force on the film surface with heat treatment at 473 K in a vacuum. It was considered that the film surface energy changed during the heat treatment and affected the frictional properties of the films.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-07-15
著者
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Tosa Masahiro
Materials Reliability Center National Institute For Materials Science
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Oishi Tetsuo
Materials Engineering Laboratory National Institute For Materials Science
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YOSHIHARA Kazuhiro
Materials Engineering Laboratory, National Institute for Materials Science
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Kasahara Akira
Materials Engineering Laboratory, National Institute for Materials Science, 3-13 Sakura, Tsukuba, Ibaraki 305-0003, Japan
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Goto Masahiro
Materials Engineering Laboratory, National Institute for Materials Science, 3-13 Sakura, Tsukuba, Ibaraki 305-0003, Japan
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Konishi Youko
Present address
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Tosa Masahiro
Materials Engineering Laboratory, National Institute for Materials Science, 3-13 Sakura, Tsukuba, Ibaraki 305-0003, Japan
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Yoshihara Kazuhiro
Materials Engineering Laboratory, National Institute for Materials Science, 3-13 Sakura, Tsukuba, Ibaraki 305-0003, Japan
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Oishi Tetsuo
Materials Engineering Laboratory, National Institute for Materials Science, 3-13 Sakura, Tsukuba, Ibaraki 305-0003, Japan
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Kasahara Akira
Materials Engineering Laboratory, National Institute for Materials Science
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Goto Masahiro
Materials Engineering Laboratory, National Institute for Materials Science
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