Highly Oriented Growth of a Pb(Mg1/3Nb2/3)O3 Thin Film on a Si(001) Substrate Using a TiN Buffer Layer
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概要
- 論文の詳細を見る
A highly ($00l$) oriented Pb(Mg1/3Nb2/3)O3 (PMN) thin film was successfully grown on a TiN buffered Si(001) substrate. The TiN buffer layer was epitaxially grown with an orientation relationship of $[110](001)_{\text{TiN}}\parallel[110](001)_{\text{Si}}$ on Si(001) by pulsed laser deposition. The PMN films were deposited using a radio-frequency magnetron sputtering technique at 500–700°C. The crystallinity, epitaxial nature and microstructures of the fabricated multi-films were investigated using X-ray diffraction and transmission electron microscopy. It was found that a PMN thin film deposited at 650°C shows a dense columnar structure with preferential (001) orientation suggesting the possibility of growing epitaxial PMN thin films on Si substrates using a TiN buffer layer.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-12-15
著者
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KIM Sang
Photonic and Electronic Thin Film Laboratory, Department of Materials Science and Engineering Chonna
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Moon Jong-ha
Photonic And Electronic Thin Film Laboratory Department Of Materials Science And Engineering Chonnam
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Yoo Chang-june
Photonic And Electronic Thin Film Laboratory Department Of Materials Science And Engineering Chonnam
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Lee Byung-teak
Photonic And Electronic Thin Film Laboratory Department Of Materials Science And Engineering Chonnam
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Shim Yeon-a
Photonic And Electronic Thin Film Laboratory Department Of Materials Science And Engineering Chonnam
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Kim Jin
Photonic And Electronic Thin Film Laboratory Department Of Materials Science And Engineering Chonnam
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Moon Jong-Ha
Photonic and Electronic Thin Film Laboratory, Department of Materials Science and Engineering Chonnam National University, 300 Yongbong-Dong, Puk-Gu, Kwangju 500-757, Korea
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Yoo Chang-June
Photonic and Electronic Thin Film Laboratory, Department of Materials Science and Engineering Chonnam National University, 300 Yongbong-Dong, Puk-Gu, Kwangju 500-757, Korea
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Shim Yeon-A
Photonic and Electronic Thin Film Laboratory, Department of Materials Science and Engineering Chonnam National University, 300 Yongbong-Dong, Puk-Gu, Kwangju 500-757, Korea
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Kim Sang
Photonic and Electronic Thin Film Laboratory, Department of Materials Science and Engineering Chonnam National University, 300 Yongbong-Dong, Puk-Gu, Kwangju 500-757, Korea
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