Development of Direct Mastering System

概要

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We have developed a direct mastering system that, without the use of electroforming, processes a photoresist on a nickel substrate and forms a stamper directly on the substrate. An anchor coat is formed on the nickel substrate, on top of which are photoresist bumps formed using photolithography technology. The photoresist bumps and anchor coat are exposed to UV light and processed by high-temperature baking, cross-linking the two layers and firmly adhering them together. Punching both the inner and outer diameters then completes the stamper. A sample stamper was manufactured and used to mold digital versatile discs (DVDs). The DVDs showed an approximately 6.4% base jitter, well within the margin of 8% set in the specification. Furthermore, even after molding 100,000 DVDs, we found no change in either the stamper or the jitter value. Compared to conventional methods, this direct mastering method uses only half the number of processes and requires one-third the amount of processing time, realizing a turn-key solution for mastering which contributes greatly to high throughput and overall cost reductions.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2003-11-15