Effects of N2 on the Growth of Multiwalled Carbon Nanotubes Synthesized by Plasma-Enhanced Chemical Vapor Deposition
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概要
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We have investigated the role of N2 in the synthesis of carbon nanotubes (CNTs) by dc hot-filament plasma-enhanced chemical vapor deposition. An NH3 and C2H2 gas mixture with a ratio of $4:1$ was used as a precursor for the synthesis of CNTs on nickel-coated TiN/Si (100) substrates. N2 gas was introduced at a flow rate of 30–120 sccm with the precursor. The structure and composition of CNTs synthesized with/without N2 were investigated by scanning electron microscopy, transmission electron microscopy, X-ray photoemission spectroscopy (XPS), and Raman spectroscopy. The multiwalled carbon nanotubes (MWCNTs) synthesized with N2 were 2–5 times longer than those synthesized without N2, and the morphology of the MWCNTs was improved. An XPS core level spectrum shows that nitrogen is in the CNX and C–NH2 forms.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-10-15
著者
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Shin Yong
Center For Nanotubes And Nanostructured Composites And Bk21 Physics Research Division Sungkyunkwan U
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Yoo Ji-beom
Center For Nanotubes And Nanostructured Composites And School Of Metallurgy And Materials Engineerin
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YANG Ji
Center for Nanotubes and Nanostructured Composites and BK21 Physics Research Division, Sungkyunkwan
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MOON Sang
Center for Nanotubes and Nanostructured Composites and BK21 Physics Research Division, Sungkyunkwan
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YANG Chul
Center for Nanotubes and Nanostructured Composites and School of Metallurgy and Materials Engineerin
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Ha Byung
Center For Nanotubes And Nanostructured Composites And Bk21 Physics Research Division Sungkyunkwan U
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Park Serng-yerl
Center For Nanotubes And Nanostructured Composites And Bk21 Physics Research Division Sungkyunkwan U
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Lee Young
Center For Nanotubes And Nanostructured Composites And Bk21 Physics Research Division Sungkyunkwan U
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Kim Hyun
Center For Liver Cancer National Cancer Center
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Kim Yun
Center For Advanced Functional Polymers Department Of Chemistry And School Of Molecular Science (bk2
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Park Chong-Yun
Center for Nanotubes and Nanostructured Composites and BK21 Physics Research Division, Sungkyunkwan University, 300 Chunchun-Dong, Suwon 440-746, Korea
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Kim Yun
Center for Nanotubes and Nanostructured Composites and BK21 Physics Research Division, Sungkyunkwan University, 300 Chunchun-Dong, Suwon 440-746, Korea
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Moon Sang
Center for Nanotubes and Nanostructured Composites and BK21 Physics Research Division, Sungkyunkwan University, 300 Chunchun-Dong, Suwon 440-746, Korea
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Ha Byung
Center for Nanotubes and Nanostructured Composites and BK21 Physics Research Division, Sungkyunkwan University, 300 Chunchun-Dong, Suwon 440-746, Korea
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Yoo Ji-Beom
Center for Nanotubes and Nanostructured Composites and School of Metallurgy and Materials Engineering, Sungkyunkwan University, 300 Chunchun-dong, Suwon 440-746, Korea
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Park Serng-Yerl
Center for Nanotubes and Nanostructured Composites and BK21 Physics Research Division, Sungkyunkwan University, 300 Chunchun-Dong, Suwon 440-746, Korea
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Yang Chul
Center for Nanotubes and Nanostructured Composites and School of Metallurgy and Materials Engineering, Sungkyunkwan University, 300 Chunchun-Dong, Suwon 440-746, Korea
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Yang Ji
Center for Nanotubes and Nanostructured Composites and BK21 Physics Research Division, Sungkyunkwan University, 300 Chunchun-Dong, Suwon 440-746, Korea
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