Effects of N2 on the Growth of Multiwalled Carbon Nanotubes Synthesized by Plasma-Enhanced Chemical Vapor Deposition

概要

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We have investigated the role of N2 in the synthesis of carbon nanotubes (CNTs) by dc hot-filament plasma-enhanced chemical vapor deposition. An NH3 and C2H2 gas mixture with a ratio of $4:1$ was used as a precursor for the synthesis of CNTs on nickel-coated TiN/Si (100) substrates. N2 gas was introduced at a flow rate of 30–120 sccm with the precursor. The structure and composition of CNTs synthesized with/without N2 were investigated by scanning electron microscopy, transmission electron microscopy, X-ray photoemission spectroscopy (XPS), and Raman spectroscopy. The multiwalled carbon nanotubes (MWCNTs) synthesized with N2 were 2–5 times longer than those synthesized without N2, and the morphology of the MWCNTs was improved. An XPS core level spectrum shows that nitrogen is in the CNX and C–NH2 forms.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2003-10-15