Color-Imaging Ellipsometer: High-Speed Characterization of In-Plane Distribution of Film Thickness at Nano-Scale

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概要

• 論文の詳細を見る

• We have developed a new type of imaging ellipsometer that is capable of rapidly visualizing the in-plane distribution of film thickness at the nanometer scale and displaying the results as a color distribution. Simultaneous use of three different wavelengths was made possible by capture with a color charge-coupled devices video camera at an acquisition speed of 5–10 frame/s followed by rapid image processing. This instrument has two main advantages when compared with a monochrome-imaging ellipsometer. The first is the capability of visualizing the difference between thin and thick areas of a film in one frame of video-image. The second is the ability to calculate the in-plane distribution of film thickness from the intensities of the three wavelengths in one frame without mechanical movements of any of the optical elements of the ellipsometer. We have demonstrated the performance of this instrument by measuring the thicknesses of four different SiO2 films simultaneously prepared on one Si substrate.

• 2001-02-15

著者

• Nagayama Kuniaki

  Laboratory Of Nano-structure Physiology Okazaki Institute For Integrative Bioscience

• Tanooka Daisuke

  Department Of Research And Development Nippon Laser And Electronics Laboratory

• Tanooka Daisuke

  Department of Research and Development, Nippon Laser & Electronics Laboratory, 20-9 Sanbonmatsu-cho, Atsuta-ku, Nagoya 456-0032, Japan

• Adachi Eiki

  Laboratory of Ultrastructure Research, National Institute for Physiological Sciences, Myodaiji-cho, Okazaki, Aichi 444-8585, Japan

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• Color-Imaging Ellipsometer: High-Speed Characterization of In-Plane Distribution of Film Thickness at Nano-Scale

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