Electrical Properties of Diamond-like Carbon Films Deposited Using a Filtered Cathodic Arc System
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概要
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A new filter arc deposition (FAD) system has been developed to satisfy the requirements of magnetic storage devices. This work briefly describes the 45° magnetic filter cathodic arc deposition process and investigates how substrate bias, hydrogenating, and nitrogen-doping affect the electrical properties of amorphous diamond-like carbon films. Experimental results indicate that increasing in substrate bias and/or nitrogen doping into the film during the process would lower the resistance of the film. All these evidences indicate the post-deposited film is more “graphite-like”. The effect of hydrogen flow in the film is less significant. It is believed that the hydrogen can prevent the nucleation of the graphite phase, and can also stabilize of sp3 bonding. The phenomenon clearly indicates that the film is more “diamond-like”.
- 2001-02-15
著者
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Tseng Yu-jen
Department Of Materials Science And Engineering National Chiao Tung University
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Li Yan-way
Department Of Materials Science And Engineering National Chiao Tung University
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Chen Chia-fu
Department Of Materials Science And Engineering National Chiao Tung University
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Li Yan-Way
Department of Materials Science and Engineering, National Chiao Tung University, Hsinchu 30050, R.O.C.
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Chen Chia-Fu
Department of Materials Science and Engineering, National Chiao Tung University, Hsinchu 30050, R.O.C.
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Tseng Yu-Jen
Department of Materials Science and Engineering, National Chiao Tung University, Hsinchu 30050, R.O.C.
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