Changes in Raman Spectra with Deposition Conditions and Plasma Treatment of Diamond Like Carbon Thin Films

概要

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A diamond like carbon (DLC) protective thin film was deposited on a Co evaporated magnetic recording tape by the electron cyclotron resonance chemical vapor deposition (ECR-CVD) method. The components of the DLC thin films were measured upon a changing the deposition conditions and plasma treatment conditions by means of Raman spectroscopy. It was found that the fluorescence level and graphite/diamond composition ratio in the DLC films influenced the film characteristics and could be controlled independently. The fluorescence level was estimated from the fluorescent background of Raman spectra and could be controlled by the reactive gas (100% C6H6) flow rate of the DLC film deposition time. In contrast, the graphite/diamond composition ratio could be controlled by means of the Ar plasma treatment after deposition. The composition ratio is the estimated parameter S1/S2 of the Raman spectrum area, where S1 is the low Raman band (nearly 1350 cm-1) area and S2 is the high Raman band (nearly 1530 cm-1) area. An increase in S1/S2 shows a high graphite ratio. The composition ratio was controlled from 0.43 to 2.04 using plasma treatment.
INSTITUTE OF PURE AND APPLIED PHYSICSの論文
1998-06-15