Electron Cyclotron Resonance (ECR) Sputtered Antireflection Coatings on Laser Facets for Optical Memory Applications
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概要
- 論文の詳細を見る
Antireflection (AR) layer coated semiconductor laser diodes may have many applications, particularly as external cavity diodes for optical memory heads. The electron cyclotron resonance (ECR) sputtering system was used for preparing AR coatings which consist of both SiO2 and Si3N4 phases. The refractive index and the thickness of the AR coatings were adjusted by controlling numerous deposition parameters, including the relative flow ratio of O2 and N2 gas flow, the total gas flow rate, the RF and ECR power, and the deposition time. AR coated AlGaAs laser diodes do not show a sharp threshold in the light output-current characteristic curve and have good potential for application in the lensless optical floppy systems.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 1998-04-30
著者
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Goto Kenya
Department Of Information & Communication Technology School Of High-technology For Human Welfare
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Kim Young-joo
Research And Development Center Samsung Electro-mechanics Co. Ltd.
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Matsuda Keita
Department Of Information And Communication Technology Tokai University
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Suzuki Masahiko
Division Of Cell Engineering Aomori Green Biocenter
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Kawai Hideki
Department Of Cardiology Fujita Health University School Of Medicine
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Tateno Ryo
Department Of Information And Communication Technology Tokai University
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Kim Young-Joo
Research and Development Center, Samsung Electro-Mechanics Co., Ltd., Suwon,
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Kawai Hideki
Department of Information and Communication Technology, Tokai University, Numazu,
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Ikura Tomowo
Department of Information and Communication Technology, Tokai University, Numazu,
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Tateno Ryo
Department of Information and Communication Technology, Tokai University, Numazu,
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Matsuda Keita
Department of Information and Communication Technology, Tokai University, Numazu,
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Goto Kenya
Department of Information and Communication Technology, Tokai University, Numazu,
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Suzuki Masahiko
Division of OA Business, Asahi Technical Laboratory Co., Ltd., Hamakita, Hamamatsu
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