Thermal Analysis of Phase Transformation in Metastable Au–Ge Films
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概要
- 論文の詳細を見る
Thermal analysis was performed on the phase transformation phenomena in sputtered Au–Ge films. The phase transformation from the metastable $\gamma$ or $\beta$ phase to the stable $\alpha+$Ge phase was detected by a reflectance change occuring with temperature or time. Two types of analyzing methods were applied, one employing the Kissinger equation under an increasing temperature condition (nonisothermal analysis), and the other employing the Johnson-Mehl-Avrami equation under an isothermal condition (isothermal analysis). It was estimated that 63.2% of the metastable phase in Au–Ge films would decompose into a stable phase within 2000 days at room temperature. This estimation was compared with the experimental results obtained for aged samples, and it was concluded that the isothermal analysis was useful for the life estimation of metastable phases in thin films.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 1989-07-20
著者
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KIKITSU Akira
Research and Development Center, Toshiba Corp.
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Komatsu Shuichi
Research And Development Center Toshiba Corporation
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Ikegawa Sumio
Research and Development Center, Toshiba Corp., KawasaKi 210
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Arai Shinji
Research and Development Center, Toshiba Corp., KawasaKi 210
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- Thermal Analysis of Phase Transformation in Metastable Au–Ge Films