Optical Mapping of the Total EL2-Concentration in Semi-Insulating GaAs-Wafers
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概要
- 論文の詳細を見る
In semi-insulating GaAs wafers the distribution of the total EL2, independent of its charge state, was determined by purely optical absorption measurements. In all (Czochralski-grown) wafers studied the radial distribution of the total EL2 is W-shaped and shows fourfold symmetry. So the fluctuations of the neutral EL2-concentration seen in the usual near infrared transmission mapping reflect essentially the inhomogeneity of the total EL2 distribution. The mean EL2+ concentration in all wafers was close to typical C- and Zn-concentrations in s.i. GaAs ($\approx 2{\cdot}10^{15}$ cm-3).
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 1989-06-20
著者
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Winnacker A.
Siemens Corporate Research and Development Laboratories, Paul-Gossen-Str. 100, D-8520 Erlangen, West Germany
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Zach F.
Siemens Corporate Research and Development Laboratories, Paul-Gossen-Str. 100, D-8520 Erlangen, West Germany
関連論文
- Optical Mapping of the Total EL2-Concentration in Semi-Insulating GaAs-Wafers
- On the Electron Photoionization Cross-Section of EL2 in GaAs