Equivalence and Accuracy of MOSFET Channel Length Measurement Techniques

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概要

• 論文の詳細を見る

• It is shown that the MOSFET channel length measurement techniques of Terada and Muta, Peng et al., Whitfield, Suciu and Johnston, and De La Moneda et al. are actually equivalent, i.e. merely different expressions of the same formula for channel length in terms of measured resistance, and that some of the transresistance methods of Jain, although not equivalent, are also related to the same formula. The accuracy of this formula is evaluated for the general case and related to the error components due to source and drain resistance asymmetry, short channel geometry effect, and variation of series resistance with bias. No independent error component due to field-induced mobility degradation is found. Finally the errors in the methods of Terada and Muta, Chen et al., Sheu et al., Wordeman et al. and Jain, are determined and compared. The gate transresistance technique is found to be the most accurate method.

• INSTITUTE OF PURE AND APPLIED PHYSICSの論文
• 1989-02-20

著者

• JAIN Sanjay

  AT & T Bell Laboratories

• Jain Sanjay

  AT & T Bell Laboratories, Allentown, Pennsylvania 18103, USA

関連論文

• A New Method for Measurement of MOSFET Channel Length : Semiconductors and Semiconductor Devices
• Equivalence and Accuracy of MOSFET Channel Length Measurement Techniques

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