Linewidth Measurement by a New Scanning Tunneling Microscope

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概要

• 論文の詳細を見る

• We have developed a new STM using monolithic parallel spring mechanisms with fiexture hinges. The STM is equipped with a two-dimensional optical interferometer to calibrate the motion of the scanner with subnanometer accuracy in real time. Distortion-free images of a grating pattern have successfully been observed.

• INSTITUTE OF PURE AND APPLIED PHYSICSの論文
• 1989-11-20

著者

• Yamada Hirofumi

  Quantum Metrology Department National Research Laboratory Of Metrology

• Nakayama Kan

  Quantum Metrology Department National Research Laboratory Of Metrology

• Fujii Toru

  Quantum Metrology Department, National Research Laboratory of Metrology, 1-1-4 Umezono, Tsukuba 305

• Nakayama Kan

  Quantum Metrology Department, National Research Laboratory of Metrology, 1-1-4 Umezono, Tsukuba 305

関連論文

• Imaging of Organic Molecules by Atormic Force Microscopy
• Drift Characteristic of Capacitive Transducer Using Glued Electrodes
• Linewidth Measurement by a New Scanning Tunneling Microscope

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