Drift Characteristic of Capacitive Transducer Using Glued Electrodes

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概要

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• The drift characteristics in glued electrodes of a capacitive transducer for small displacements were measured for two kinds of adhesives. The factors determining drift in the nanometer range are discussed.

• 社団法人応用物理学会の論文
• 1986-09-20

著者

• Kuroda Kazuaki

  Quantum Metrology Department National Research Laboratory Of Metrology

• Nakayama Kan

  Quantum Metrology Department National Research Laboratory Of Metrology

関連論文

• Imaging of Organic Molecules by Atormic Force Microscopy
• Drift Characteristic of Capacitive Transducer Using Glued Electrodes
• Linewidth Measurement by a New Scanning Tunneling Microscope

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