SrTiO3 Thin Films with Visible-Light Band Gap Fabricated by Nitrogen Reactive Sputtering

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概要

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• Strontium titanate (SrTiO3; STO) films with extremely high nitrogen concentration, grown by an rf reactive magnetron sputtering system, were investigated by spectroscopic ellipsometry, X-ray diffraction, and X-ray photoemission spectroscopy measurements. A significant shift of the absorption edge to a visible-light region was observed, and surprisingly, the bandgap of nitrogen-doped STO containing up to 9.5 at. % of nitrogen shifted from 3.5 eV of pure STO to 1.9 eV. The result indicates the successful substitutional doping of nitrogen into the STO lattice, demonstrating the feasibility of band-gap narrowing through nitrogen reactive sputtering.

• Japan Society of Applied Physicsの論文
• 2007-05-25

著者

• Mori Toshiyuki

  Fuel Cell Materials Center, National Institute for Materials Science (NIMS), 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan

• Honma Itaru

  National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8568, Japan

• Kim Je-Deok

  Fuel Cell Materials Center, National Institute for Materials Science (NIMS), 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan

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• SrTiO3 Thin Films with Visible-Light Band Gap Fabricated by Nitrogen Reactive Sputtering

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