Evaluation of Critical-Point Behavior of Fluoro-Compounds

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概要

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• The critical-point characteristics of a fluoro-compound were examined using a high-pressure chamber with glass windows and a photocell to detect transmitted light. A sharp drop in transmittance was used as an indicator of the critical point. For a pure fluoro-compound, the drop occurs in very narrow temperature and pressure ranges. However, the addition of alcohol broadens the pressure range. When the pressure is high, the temperature needed for the drop in transmittance is also high. This might be because the molecules of the fluoro-compound and alcohol form somewhat larger clusters, which cause light scattering over a wider range of pressures.

• Japan Society of Applied Physicsの論文
• 2006-09-25

著者

• Namatsu Hideo

  NTT Advanced Technology Corporation, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0124, Japan

関連論文

• Water-Soluble Barrier Material for Three-Layer Resist Systems
• Evaluation of Critical-Point Behavior of Fluoro-Compounds

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