Laboratory-Scale High-Magnification Soft X-Ray Microscope with Relayed Tandem Wolter Mirrors
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概要
- 論文の詳細を見る
A laboratory-scale high-magnification soft X-ray microscope was developed using relayed tandem Wolter mirrors to obtain a high-resolution X-ray image using a charge-coupled device (CCD) camera. The optical axis of the second mirror was inclined to the first optical axis to make their angular apertures coincide. The total magnification, which is the product of the two mirror systems, was approximately 1000. A spatial resolution better than 100 nm was achieved with 3.2 nm X-rays and a CCD camera.
- Japan Society of Applied Physicsの論文
- 2006-07-25
著者
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Aoki Sadao
Graduate School Of Pure And Applied Sciences University Of Tsukuba
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Hoshino Masato
Graduate School Of Pure And Applied Sciences University Of Tsukuba
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Hoshino Masato
Graduate School of Pure and Applied Sciences, University of Tsukuba, 1-1-1 Tennohdai, Tsukuba, Ibaraki 305-8573, Japan
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Aoki Sadao
Graduate School of Pure and Applied Sciences, University of Tsukuba, 1-1-1 Tennohdai, Tsukuba, Ibaraki 305-8573, Japan
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