The Ellipsometric Measurements of a Curved Surface

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概要

• 論文の詳細を見る

• A three-intensity imaging ellipsometric technique is proposed to investigate the surface topography as well as the refractive index profile (RIP) of a lens. The azimuth deviation of polarizer caused by the tilting of a SiO2 thin film on Si substrate was investigated after a careful calibration on the azimuth position of polarizer of the water-surface. The azimuth deviation of polarizer is proved to be the local surface normal; thus we can determine not only the radius of curvature of a Plano-Convex lens from the measurement, but also its incident-angle-corrected RIP.

• Japan Society of Applied Physicsの論文
• 2005-07-10

著者

• Lee Kan

  Department Of Photonics Institute Of Electro-optical Engineering National Chiao Tung University

• Chao Yu

  Department Of Photonics Institute Of Electro-optical Engineering National Chiao Tung University

• Lee Kan

  Department of Photonics, Institute of Electro-Optical Engineering, National Chiao Tung University, 1001 Ta Hsueh Road, Hsinchu, Taiwan

関連論文

• Index Profile of Radial Gradient Index Lens Measured by Imaging Ellipsometric Technique
• The Ellipsometric Measurements of a Curved Surface

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