Design of Functional Inorganic Materials by Ion Beams. Ion Beam Induced Epitaxial Crystallization of Inorganic Materials.

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概要

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• IBIEC (Ion Beam Induced Epitaxial Crystallization) is one of the methods of SPEC (Solid Phase Epitaxial Crystallization) and is characterized by its low temperature crystallization and low thermal activation energy relative to thermally induced SPEC. IBIEC has been investigated for many years from the view of interest in its mechanism concerned with ion-solid interaction and application to a low temperature SPEC process particularly in Si. Recently, this technique has been tried to apply to many different kinds of materials such as compound semiconductors (GaAs, BP, InP and GeSi), carbide (SiC), silicides (NiSi<SUB>2</SUB> and CoSi<SUB>2</SUB>) and even oxides (Al<SUB>2</SUB>O<SUB>3</SUB> and SrTiO<SUB>3</SUB>). In this article, the authors reviewed the features, proposed mechanisms and application of IBIEC to Si and other materials with the existing state of affairs.

• 公益社団法人 日本表面科学会の論文

著者

• 大吉 啓司

  筑波大 物工

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• Design of Functional Inorganic Materials by Ion Beams. Ion Beam Induced Epitaxial Crystallization of Inorganic Materials.

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