イオンビームによるガラス基板へのリン珪酸ガラス層の形成

概要

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PSG layers were prepared by P+ ion implantation in silica, Na2O-SiO2, and Na2O-CaO-SiO2 glasses. The chemical state of the implanted P was evaluated by X-Ray photoelectron spectroscopy. In the silica glass, a part of the implanted P reacts with O. The remaining P are, however, oxidized by subsequent O+ implantation. Enhancement of the Na-gettering effect by the PSG layer in the additionally implanted O+ is observed by secondary ion mass spectrometry. In Na2O-SiO2 and NaO2-Ca0-SiO2 glasses, the oxidation of P depends on the glass composition and dose of P+ ions. In Na2O-SiO2 glasses, the number of oxidized P increased with an increase in the molecular ratio of Na2O/SiO2. Substitution of CaO for Na2O or SiO2 suppresses oxidization of the implanted P compared with the Na2O-SiO2 glass. The dependence of the oxidization of implanted P on the glass composition is discussed from the standpoint of surface-alkali depletion by ion implantation.
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