半導体式微差圧センサを応用した気流変動の測定・評価手法

概要

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Airflow measurements in narrow space such as in boundary layer is important in order to study the relationship between the airflow turbulence and the aerosol behavior. However, the measurement is extremely difficult when the airflow speed is low. In this study, an evaluation technique of airflow turbulence by the measurement of pressure difference by a CMOS pressure gauge was proposed. The measurement of pressure difference was conducted using small tubes which are applicable to narrow space. The CMOS pressure gauge had a quick response to airflow turbulence at a high frequency. Preliminary test showed that the CMOS pressure gauge can provide airflow measurement with a high accuracy in wide range even at a very low airflow velocity. It was also found that the measurement accuracy was improved with an oversampling technique, even when the resolution of a sensor was not enough. The evaluation of airflow turbulence by CMOS pressure gauge had many advantages over the conventional measuring techniques.