キャピラリー放電を用いたDiamond-Like Carbon薄膜の成膜技術の開発（第2報）:—キャピラリー放電による蒸着への放電管材質の影響—

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概要

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• We have been studying the Pulsed Plasma Deposition (PPD) technique for applying diamond-like carbon film deposition. This technique is one of the applications of the capillary discharge, and the deposition process is based on an ablation. In this study, we have found that the discharge tube material affect the discharge condition and the optical emission spectrum of the plume. We have also succeeded to increase the discharge current using a earth attached to the capillary tube. This earth has been effective for stabilizing the discharge. It can be concluded that the electrical properties (dielectric constant and conductivity) and physical property (melting point) of the discharge tube affect the capillary discharge.

著者

• 清水 政義

  Shimizu Densetsu Kogyo Co., Ltd.

• 藤井 清利

  Graduate School of Engineering, University of Hyogo

• 藤原 閲夫

  Graduate School of Engineering, University of Hyogo

• 井上 尚三

  Graduate School of Engineering, University of Hyogo

関連論文

• キャピラリー放電を用いたDiamond-Like Carbon薄膜の成膜技術の開発
• キャピラリー放電を用いたDiamond-Like Carbon薄膜の成膜技術の開発（第2報）:—キャピラリー放電による蒸着への放電管材質の影響—

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