Effect of Discharge Gap Shape on High-Speed Electrostatic Discharge Events
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概要
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To clarify the characteristics of high-speed electrostatic discharge (ESD) events, we use two kinds of discharge electrodes: sphere- and cylinder-shape ones. We measure the energy level of ESD waveforms with charging voltages of 0.25, 0.5, and 1.0kV. We find that the cylindrical electrode yields higher high-speed ESD energies, especially when the charging voltage is high; this indicates that the discharge gap shape is an important factor in ESD events.
著者
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AKIYAMA Yoshiharu
NTT East Corporation
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MURAKAWA Kazuo
NTT East Corp.
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MASUGI Masao
Ritsumeikan University
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HIRASAWA Norihito
NTT Energy & Environment Systems Laboratories, NTT Corporation
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- Effect of Discharge Gap Shape on High-Speed Electrostatic Discharge Events