イオンマイクロアナライザ-による定量分析における基礎的問題

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In analysis of hydrogen in metals and alloys by SIMS, control of the hydrogen blank mainly due to residual gases is a persistent problem. Contrarily, this problem becomes less important in case of deuterium analysis. The prescribed amounts of deuterium were introduced into a pure titanium and a beta-titanium alloy (Ti-6.6wt%Fe) by the gas reaction method. Intensities of the various secondary ions sputtered from each sample were measured by the Hitachi Ion Microanalyzer with primary ions of Ar+. Energy distributions of the various secondary ion species were measured with the energy window of about15eV width. The effects of oxygen gas pressure in the target chamber and the bulk deuterium concentrations on the shape of energy distribution curves are discussed. For all samples, intensity of D- ions is higher than that of D+ ions, especially at higher energy ranges. With increasing the deuterium concentration: a) intensities of D+and D- ions from Ti-D system increased, but their shape of distribution curves remained unchanged. b) not only the intensities but also their shape of distribution curves of D- ions from Ti-6.6%Fe-D system varied, but no change was observed in the shape of the curve of D+ ions. The change in the intensities was more remarkable at the higher energy range. By setting the position of energy window at higher energy range, the linearity increased on the relation between the intensity of D- ions and the bulk deuterium concentration for Ti-6.6%Fe-D system. Intensity and shape of the energy distribution curve of Ti+, TiO+ and O+ ions, respectively, ejected from a titanium dioxide (rutile) are compared with those measured on a pure titanium with introduction of oxygen gas into the target chamber; origin of the ion species observed is briefly discussed.
日本質量分析学会の論文

イオンマイクロアナライザ-による定量分析における基礎的問題

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