斜入射軽イオンスパッタリングの角度分布

概要

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The bombarding angle dependence and the angular distributions of the light-ion sputtering have been investigated by the computer simulation and the direct-knock-out model, where the Ni target is bombarded by 450eV and lkeV H. As a computer simulation code we adopted the ACAT code. The main feature of the light-ion sputtering at oblique incidence is found to be described by the direct-knock-out process. The interatomic potential is an important factor for the bombarding-angle dependence of the light-ion sputtering. In the case of lkeV H<SUP>+</SUP> the ACAT results of the bombarding-angle dependence and the angular distribution are in good agreements with experiments. The experimental angular distributions of 450eV H<SUP>+</SUP>→Ni at oblique incidence (>80°) cannot be explained by both the ACAT simulation and the directknock-out model, and seems to be much influenced by the surface roughness.
社団法人プラズマ・核融合学会の論文