チタン-ニッケル系非晶質合金皮膜の耐食性に及ぼすクロム及びタングステン添加の影響

概要

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Alloy films of Ti-Ni-Cr (Cr: 0-11 at.%) and Ti-Ni-W (W: 0-21 at.%) were prepared by RF sputtering on water-cooled glass substrates to investigate the effect of the alloying element (chromium or tungsten) on the corrosion behavior of the alloy films. Structural analysis of the samples was made by X-ray diffraction and Auger electron spectroscopy (AES), and their corrosion resistance was evaluated by means of an immersion test in HCl solutions. The results obtained are as follows: 1) Ti-Ni-Cr and Ti-Ni-W alloy films were confirmed by X-ray diffraction analysis to be amorphous over the whole range of compositions in this study. 2) Corrosion resistance of Ti-Ni-Cr alloy films was increased markedly by the addition of chromium in 1N-HCl. After annealing at 600°C, crystallization was observed with a slight decrease in corrosion resistance. 3) No increase in corrosion resistance was observed with the addition of chromium in 6N-HCl. 4) In the case of Ti-Ni-W alloy films, the addition of tungsten produced no increase in corrosion resistance in 1N-HCl, but resulted in a remarkable increase in 6N-HCl.
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