蒸着法によるBaTiO3薄膜の作成

概要

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The films of BaTiO3 were prepared by two types of evaporating methods. The films made by these methods were baked in air at various temperatures for different length of time. Their composition was checked by means of X-ray diffractometer. In the case of the films which were not at all baked, no BaTiO3 was seen at all. When these films were baked gradually from a low temperature to higher temperatures, turned into tetragonal phases at 1200°C. The above phasic changes took place regardless of difference in substrate temperatures used (250°C-500°C), and were not affected by either of the evaporating methods applied. The crystal formation of BaTiO3 was closely related to the evaporation rate, and was little influenced by the temperatures of the tungsten heater.
社団法人日本材料学会の論文