BaTiO3真空蒸着膜

概要

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It is reported here the relationship between the structural and electrical properties of the vacuum deposited BaTiO3 films and the degree of vacuum. The X-ray diffraction patterns indicated that the structure of the film deposited at 1 × 10-3 to 1 × 10-4 Torr and at 1 × 10-5 to 1 × 10-6 Torr were hexagonal and tetragonal phase, respectively. The samples were annealed and the dielectric constants were measured. These values were 100 to 300 and 1200 to 1300 for the hexagonal and tetragonal phase films, respectively.
日本真空協会の論文