位置検出器内蔵LDM駆動顕微鏡X-Yステージの特性

概要

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There are many linear direct driving actuators. As these dont need convert mechanism which converts rotating motion to linear motion, these type actuators would realize simple structure and fast driving. One of direct drive actuators, linear DC motor is applied to drive X-Y stage. Therefore, structure is simplified and fast and precise control of position are realized.The X-Y stage drived by linear DC motors is developed for a microscope. The X-Y stage is drived by two dimensions direct drive linear DC motor, is supported by piano wire spring, has built-in type position detector which is two dimension flat type linear variable differential transformer within actuator and controller which is controlled by micro processor. As a rsult, the X-Y stage that is simple and compact structure is controled within an error of 10μm in the required range from -1.2mm to 1.2mm by PID control.
社団法人電気学会の論文