マイクロ波を利用した微細電子回路上の金属加熱技術の開発

概要

論文の詳細を見る
The microwave heating system using evanescent wave for soldering fine circuits had been proposed. The evanescent wave is useful for the microwave heating very locally. The heating system consists of a matching circuit and a resonator for enhancing the magnetic field around the mouth of a circular waveguide in which the strong evanescent waves are excited. The experiments of heating lead-free solders have been done with the microwave at a frequency of 2.3-2.35 GHz and a power of about 200 W. The lead-free solder can be heated locally to be melted with microwave without any breakdown in the resonator.