不変集合を利用したシリコンウエハ搬送ロボットの動作切り換え制御

概要

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This paper considers control design problems that can reduce a throughput time of total task of a robotic manipulator which is used in handling silicon semiconductor wafers. We propose an algorithm for discontinuous switchings between translatory and rotational motions. We derive the motion switching algorithm by utilizing an invariant set of the rotational dynamics. The effectiveness of the proposed algorithm is evaluated though experimental studies.