プラズマ発生装置用高純度ガス精製装置と精製ヘリウムの微量成分の分析

概要

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The performance of “extremely pure gas supplier” installed to the MACETIE in the Institute of Plasma Physics, Nagoya University, is described. In order to control the absolute amount of gas injected into the device, the purifier is equipped with precision pressure gauges and thermometers. Mass spectrometric analysis of helium before and after purification was carried out by ultra-high vacuum analyzing chamber and CEC 21614 residual gas analyzer. Impurities except hydrogen in helium were reduced from up to 400 p. p. m. to less than 1 p. p. m. by the liquid nitrogen cooled charcoal trap. Hydrogen, as we expected, could not be reduced at all. Precise analysis of commercial deuterium and hydrogen were also carried out, and compared with the specifications of manufactures.
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