CdS蒸着膜の熱処理効果

概要

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By way of preliminary experiment for development of thin film active devices, resistivity, optical transmission, crystallinity, and Hall mobility of evaporated CdS films was studied as a function of preparation and processing. During the processing, evolved gases from films were analyzed with an omegatron mass spectrometer and weight changes of films were obserbed by means of a microbalance.<BR>Properties of evaporated CdS films were found to depend critically on the evaporation condi tions such as the source temperature and the substrate temperature. During the baking of evaporated CdS films in high vacuum, Cd atoms and sulfide gases were evolved from films, and great changes in electrical properties and crystallinity were observed. After the baking of evaporated films in air or in oxygen, the electrical properties were also altered and X-ray analysis of the films indicated the presence of CdO. These facts show that electrical and optical properties of evaporated CdS films are related to amounts of excess Cd present in the films and to crystallinity of the films, and that the properties of baked films also depend on the initial evaporation conditions. Condensation process of films and mechanism of baking process of them are discussed on the basis of the experimental results.
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