集束イオンビーム描画装置用高圧電源

概要

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Generally, double-stage demagnified electorostatic lenses are used for a focused ion beam instrument.<BR>The instrument needs at least three high voltage output terminals (accelerator, condenser lens and objective lens). With the increase of the accelerating energy, these lenses need higher forcusing potentials.<BR>The simplest method to supply thsese three potentials from one high voltage generator is to use a bleeder resistor consisting of many high megohm resistors, but large voltage change is induced on thsese terminals when unstable microdischarge is caused across the lens electrodes. As a result, the beam shift and defocus of the ion beam are caused.<BR>By solving these problems, a, new high voltage generator which directly supplies three potentials from a CockcroftWalton high voltage multiplier circuit has been developed.<BR>The internal resistance from each terminal is 3 orders smaller than the conventional method (bleeder registor); therefore, there is no deterioration of the focusing property even if micro-discharges of a few microampares occur across the lens electrodes.
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