ビーム装置用特殊結線方式高圧電源

概要

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In the conventional DC high-voltage power supply for an electron beam machine has many disadvantages. The paper is aimed to suppress the ripple voltage within the allowable limitation by the small-size filter. This new-type circuits consists of the three-phase bridge-circuits in which the phase are lagged to each other by 2π/P in the secondary side of the transformer and the circuits are connected with the cascade in the DC output side. The new-type DC high-voltage power supply (+50KV., 10MA, ripple factor 1 × 10<SUP>-4</SUP>) was designed and manufactured, and the anticipated data was obtained. The value of the LC product of the filter can be reduced to about 1/10 of the conventional three-phase bridge-circuit. Then, it results that the cost of the filter device is reduced approximately to 1/4 and the size of the power supply becomes remarkably small. The design principle and preliminary performance of the DC high-voltage power supply with silicon rectifiers are analytically discussed in detail.
日本真空協会の論文