Reduction of effective sputtering yield by honeycomb structures.

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概要

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• The sputtering yield of Mo honeycomb walls was compared with the yield of flat walls in a d.c. Ar glow discharge. Under the experimental condition where the mean energy is approximately 1 keV and the angle of incidence of primary ions strongly distributed around normal, the yield is reduced by a factor of 20 to 30. Before and after the bombardment, the surface topography of the honeycomb targets was observed by a scanning electron microscope.

• 一般社団法人 日本原子力学会の論文

著者

• Nakamura Hiroo

  Japan Atomic Energy Research Institute

• Saidoh Masahiro

  Japan Atomic Energy Research Institute

• SONE Kazuho

  Japan Atomic Energy Research Institute

• SHIMIZU Masatsugu

  Japan Atomic Energy Research Institute

• OBARA Kenziro

  Japan Atomic Energy Research Institute

• ABE Tetsuya

  Japan Atomic Energy Research Institute

• OHTSUKA Hidewo

  Japan Atomic Energy Research Institute

• YAMADA Rayji

  Japan Atomic Energy Research Institute

• NAKAMURA Hiroo

  Japan Atomic Energy Agency

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