微結晶Ge-Fe-Ox膜の磁気的性質

概要

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Small-crystallite Ge-Fe-Ox films, of 0.6-1.0 μm thick, were made from Ge and Fe as the starting materials by vacuum evaporation under Po2=10-2 torr. Crystal phases and perpendicular magnetic anisotropy of these films were investigated. Two phases having small-crystallite irons and amorphous GeO2⋅Fe2O3 coexisted in these films where GeO2 contents (Ge/Ge+Fe) are in the region between 22 and 48 wt%. The films containing more than 48 wt% of GeO2 content were characterized by amorphous structure. GeO2 was inferior to P2O5 in the capability of making the iron oxide amorphous, because amorphous iron oxides were prepared by the addition of 16 wt% of P2O5. When Ge and Fe were evaporated under Po2=10-2 torr simultaneously, small-crystallite irons were accumulated in the films because of the incomplete reaction between GeO2 and FeOx on the glass substratre. The ferromagnetic properties of the films were originated in these small-crystallite irons. The perpendicular magnetic anisotropy films were prepared in the limited region from 22 to 32 wt% of GeO2 content. The perpendicular magnetic anisotropy constant (Ku) was 2×104 erg/cm3, that was less than those of BaFe12O19 film, CoFe2O4 film and amorphous GdFe alloy film. The perpendicular magnetic anisotropy seemed to be induced by the shape anisotropy of the columnar structure having small-crystallite irons.
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