2元真空蒸着法による非晶質CoFe2O4膜の作成および組織

概要

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Amorphous cobalt ferrite films were prepared by the dual source evaporation method adopting CoFe2 alloy and P2O5 as the starting materials. The films were made under various levels of pressure of evaporated P2O5 (PP2O5) and the maximum perpendicular magnetic anisotropy constant, 8 × 104 J/m3, was obtained at PP2O5= 1.3 Pa. The observation of SEM showed that the films were composed of the oriented texture with a fine columnar structure, which was presumed the cause of the large magnetic anisotropy. The binding energies of Co, Fe, P and 0 of the film were measured by ESCA and it was found that a small amount of nonreactive oxides of Co and Fe were still extant and also the existence of phosphorus oxides with P3+ and P5+. The measurement of broad Mossbauer spectrum could be assumed that the films have a complex magnetic structure.
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