Remote Detection of Airborne Particles by Image Processing System

概要

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Direct detection of airborne particles is very useful for various studies such as clean rooms, air leakage of filters, pinhole testing, etc. This technique covers the weak points of the commonly used optical measuring equipments, which have field disturbance with sampling, particulate adhesion inside the sampling tube, etc. In this paper, the methods and experiments are reported for remote detection of particles. Scattered laser light of a particle is remotely detected by using an optical system, a video system and an image processing system. By emitting a He-Ne laser beam into the clean room space, scattered light of a particle is caught by a TV camera through optical lenses located at about one meter distance from the detected space. The TV image of scattered light is recorded on a video tape. The recorded image is analyzed to automatically obtain the number of particles in any objective space. Furthermore, an example of application of this technique is discussed for the adhesion to the surface of silicon wafers.
日本エアロゾル学会の論文