エアロゾルデポジッション法により作製したPNN-PT-PZ系圧電体厚膜に及ぼす原料粉の影響

概要

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Effects of primary powders on PNN-PT-PZ piezoelectric thick films prepared by aerosol deposition method (ADM) have been studied. Powders clashed in strong impact occurred by collision between primary powder and substrate during the deposition were selectively deposited. Primary powders with high crystallinity were effective for producing thick films having high piezoelectric properties. The piezoelectric thick films in thickness of 38 μm formed by using PNN-PT-PZ piezoelectric ceramics powders with high crystallinity were annealed at 800°C for 1h, so that their piezoelectric constants (d31) were-189 pm/V.