パルスカウント法によるイオン電流測定の精度向上を目指す二次電子増倍管計数効率の新しい測定方法

概要

論文の詳細を見る
A new method to precisely measure ion counting efficiencies of electron multipliers (SEM) has been developed in order to improve the accuracy of the pulse counting vapor pressure measurement over the ultra low vapor pressure range. This method combines the pulse counting as well as the SEM output current measurement by use of a pulse height analyser with the SEM multiplication factor measurement by use of a Faraday cup system. By using the proposed method, the ion counting efficiencies of SEM for the ions except H2+ have been determined to be 1.0 for ion energies higher than a threshold value close to 7 keV. While, that of H2+ was 1.1. Further, a new method to precisely measure SEM multiplication factors using PHA has also been presented.
日本質量分析学会の論文