Synthesis of Diamond Film on Molybdenum Substrate Surface by Combustion Flame Considering the Delamination of the Interface
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概要
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Diamond films were synthesized on a Mo substrate using combustion flame. During cooling process, the most diamond films delaminated from the Mo substrate because of their thermal expansion mismatch. To prevent the delamination, a three-step synthesis method was proposed. The first step was synthesis of the Mo2C and the diamond phases on the Mo substrate, and the second and the third steps were synthesis of the diamond phase. The interfacial stress between the film and substrate was calculated by a finite element method. According to the results, the stress in the film made by the method was smaller than that by an one-step synthesis method. The three-step method is useful for synthesizing the diamond film.
- 一般社団法人 日本機械学会の論文
著者
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Ohyoshi Tadashi
Department Of Mechanical Engineering Faculty Of Engineering And Resource Science Akita University
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Kamiya Osamu
Department Of Mechanical Engineering Faculty Of Engineering And Resource Science Akita University
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Takahashi Mamoru
Department Of Agricultural Chemistry Utsunomiya University
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ITO Shunichi
Semiconductor Energy Laboratory
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TAKAHASHI Mamoru
Department of Mechanical Engineering, Akita University
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