大気圧水素混合ヘリウムグロー放電の気体温度と電子密度の測定

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In this report,experimental results on gas temperatures and electron densities in sub-atmospheric pressure glow discharge in helium with 1% hydrogen mixture are presented.Experiments were carried out with micro-plasma generated in a micro-hollow cathode discharge,0.5mm in diameter and 3.0mm in length of cylindrical hollow drilled in the metal and ceramics sandwich structure by emission spectroscopy.To derive gas temperature and electron density,spectral line shapes analysis were carried out considering pressure broadening,such as resonance or van der Waals,Stark broadening and Doppler broadening of helium line spectra of 667.8nm and hydrogen H-alpha 656.3nm.Obtained results showed qualitatively good agreement with other reports at higher gas pressure over 20kPa.Gas temperature grows from 300K at 20kPa linearly to 600K at 100kPa.Electron density grows from 0.5×10 14 cm -3 at 20kPa to 3.0×10 14 cm -3 at 100kPa.And at lower pressure than 20kPa,electron temperature increased with decrease of gas pressure.